Selective Area Epitaxy and Optoelectronic Integrated Circuits (OEIC), Paul R. Berger

Student and Post-Doc: Paul R. Berger (Ph.D 1990, Bell Labs 1990-1992) Advisor: Pallab K. Bhattacharya (University of Michigan, Ann Arbor) Post-Doc Advisor: Niloy K. Dutta (formerly of AT&T Bell Laboratories)

Importance of the Problem:

The monolithic integration of dissimilar devices is highly advantageous to minimize parasitic interconnections and capacitive interdevice coupling. Therefore, the vertical stacking of devices can lead to degraded circuit and system performance. The selective area epitaxial regrowth of a second device beside a first device can alleviate these side effects and provide for optimal functionality.

Brief Description of Our Work and Results:

Developed a variety of optoelectronic integrated circuits (OEIC) by developing selective area MBE regrowth techniques and applying this towards numerous monolithic integrations (p-i-n-MODFET, laser-laser, HBT-laser, MODFET-laser etc.). For instance, monolithic p-i-n-MODFET circuits were shown to operate at 10 GHz bandwidths.

Awards, Citations and Recognitions

• Session Chair, "Testing and Reliability of Optoelectronic Devices," SPIE's 2001 Photonics West in San Jose, CA (January 20-26, 2001).
• Program Committee, IEEE International Electron Devices Meeting (IEDM) in San Francisco, CA Quantum Electronics & Compound Semiconductor Committee; Session Co-Chair "Quantum Effect Devices," December 1998.
• Program Committee, IEEE International Electron Devices Meeting (IEDM) in Washington, DC Quantum Electronics & Compound Semiconductor Committee; Session Co-Chair "Heterojunction Transistors and Photodetectors," December 1997.
• Program Committee, SPIE's Optoelectronics '97: Silicon-Based Monolithic and Hybrid Optoelectronic Devices in San Jose, CA; Session Chair "Photodetectors," February 1997.

Publications

1. "Monolithic GaAs/AlGaAs Optical Transmitter Using a Single Growth Step," D. Nichols, J. Lopata, W. S. Hobson, N. K. Dutta, P. R. Berger, D. Sivco, and A. Y. Cho, Electronics Letters, 30, pp. 490-491 (March 17, 1994). PDF (161 kB)

2. "10 GHz Bandwidth Monolithic pin Modulation-Doped Field Effect Transistor Photoreceiver," N. K. Dutta, J. Lopata, P. R. Berger, S. J. Wang, P. R. Smith, D. Sivco, and A. Y. Cho, Applied Physics Letters, 63, pp. 2115-2116 (October 11, 1993). PDF (249 kB)

3. "Monolithic GaAs/AlGaAs p-i-n MESFET Photoreceiver Using a Single Molecular Beam Epitaxy Growth Step," D. Nichols, N. K. Dutta, P. R. Berger, P. R. Smith, D. Sivco, and A. Y. Cho, Electronics Letters, 29, pp. 1133-1134 (June 10, 1993). PDF (216 kB)

4. "8-Element Linear Array of Monolithic pin-MODFET Photoreceivers Using Molecular Beam Epitaxial Regrowth," Paul R. Berger, Niloy K. Dutta, Dexter A. Humphrey, Peter R. Smith, Sheunn-Jyi Wang, R. K. Montgomery, D. Sivco, and A. Y. Cho, IEEE Photonics Technology Letters, 5, pp. 63-66 (January 1993). PDF (399 kB)

5. "1.0 GHz Monolithic pin-MODFET Photoreceiver Using Molecular Beam Epitaxial Regrowth," Paul R. Berger, Niloy K. Dutta, Dexter A. Humphrey, Peter R. Smith, Sheunn-Jyi Wang, R. K. Montgomery, D. Sivco, and A. Y. Cho, IEEE Photonics Technology Letters, 4, pp. 891-894 (August 1992). PDF (344 kB)

6. "A GaAs Quantum Well Laser and Heterojunction Bipolar Transistor Integration Using Molecular Beam Epitaxial Regrowth," Paul R. Berger, N. K. Dutta, D. L. Sivco, and A. Y. Cho, Applied Physics Letters, 59, pp. 2826-2828 (November 25, 1991). PDF (380 kB)

7. "Monolithic Integration of GaAs and In_0.2Ga_0.8As Lasers By Molecular Beam Epitaxy on GaAs," Paul R. Berger, N. K. Dutta, J. Lopata, S. N. G. Chu, and Naresh Chand, Applied Physics Letters, 58, pp. 2698-2700 (June 10, 1991). PDF (415 kB)

8. "Monolithically Integrated InP-based Front End Photoreceivers," Yousef Zebda, Richard Lai, Pallab Bhattacharya, Dimitris Pavlidis, Paul R. Berger, and Timothy L. Brock, IEEE Transactions on Electron Devices, ED-38, pp. 1324-1333 (June 1991). PDF (931 kB)

9. "InGaAs/GaAs Multiquantum Well Electro-Absorption Modulator with Integrated Waveguide," Utpal Das, Paul R. Berger, and Pallab K. Bhattacharya, Optics Letters, 12, pp. 820-822 (October 1987). PDF (489 kB)

10. "Investigation of the Interface Region Produced by Molecular Beam Epitaxial Regrowth," D. Biswas, P. R. Berger, U. Das, J. E. Oh, and P. K. Bhattacharya, Journal of Electronic Materials, 18, pp. 137-142 (March 1989).

11. "Recombination Velocity at Molecular Beam Epitaxial GaAs Regrown Interfaces," D. Biswas, P. R. Berger, and P. K. Bhattacharya, Journal of Applied Physics, 65, pp. 2571-2573 (March 15, 1989). PDF (465 kB)

12. "In_0.53Ga_0.47As p-i-n Photodiodes with Transparent Cadmium Tin Oxide Contacts," Paul R. Berger, Niloy K. Dutta, George Zydzik, Hank M. O'Bryan, Ursula Keller, Peter R. Smith, John Lopata, D. Sivco, and A. Y. Cho, Applied Physics Letters, 61, pp. 1673-1675 (October 5, 1992). PDF (341 kB)

13. "Monolithically Peltier-cooled Vertical-cavity Surface Emitting Lasers," Paul R. Berger, Niloy K. Dutta, Kent D. Choquette, Ghulam Hasnain, and Naresh Chand, Applied Physics Letters, 59, pp. 117-119 (July 1, 1991). PDF (291 kB)

14. "Performance Characteristics of InGaAs/GaAs Large Optical Cavity Quantum Well Lasers," N. K. Dutta, J. Lopata, P. R. Berger, D. L. Sivco, and A. Y. Cho, Electronics Letters, 27, pp. 680-682 (April 11, 1991). PDF (218 kB)

15. "A Waveguide Directional Coupler With A Nonlinear Coupling Media," Paul R. Berger, Pallab Bhattacharya, and Shantanu Gupta, Special Issue of Journal of Quantum Electronics on Photonic Devices and Circuits, QE-27, pp. 788-795 (March 1991). PDF (645 kB)

16. "Orientation-Dependent Phase Modulation in InGaAs/GaAs Multiquantum Well Waveguides," Utpal Das, Yi Chen, Pallab Bhattacharya, and Paul R. Berger, Applied Physics Letters, 53, pp. 2129-2131 (November 28, 1988). PDF (485 kB)

17. "Demonstration of All-Optical Modulation in a Vertical Guided Wave Nonlinear Coupler," Paul R. Berger, Yi Chen, Pallab K. Bhattacharya, Jagadeesh Pamulapati, and G. C. Vezzoli, Applied Physics Letters, 52, pp. 1125-1127 (April 4, 1988). PDF (578 kB)

Invited Talks

1. "Laser and Photoreceiver Arrays for Parallel Optical Data Link Applications," N. K. Dutta, and P. R. Berger, 181st Electrochemical Society Meeting in St. Louis, MO, (1992).

Conference Presentations

2. "Integrated Optical Receivers and Transmitters for Use in Wide-Bandwidth Optical Transmission Systems," D. T. Nichols, J. Lopata, W. S. Hobson, P. R. Berger, P. R. Smith, N. K. Dutta, D. L. Sivco, A. Y. Cho, Optical Fiber Communication Conference in San Jose, CA (1994).

3. "10 GHz Bandwidth Monolithic pin-MODFET Photoreceiver," N. K. Dutta, J. Lopata, P. R. Berger, P. R. Smith, D. L. Sivco, and A. Y. Cho, Conference on Lasers and Electro-optics in Baltimore, MD (1993).

4. "Eight-Element Linear Array Monolithic pin-MODFET Photoreceivers Using Molecular Beam Epitaxial Regrowth," Paul R. Berger, Niloy K. Dutta, Sheunn-Jyi Wang, Dexter A. Humphrey, Peter R. Smith, R. K. Montgomery, D. Sivco, and A. Y. Cho, Optical Fiber Communication Conference in San Jose, CA (1993).

5. "Monolithic pin-MODFET Photoreceivers With Molecular Beam Epitaxial Regrowth," Paul R. Berger, Workshop on Compound Semiconductor Materials and Devices in Santa Monica, CA (1993).

6. "Integrated Photoreceiver Array Using Molecular Beam Epitaxial Regrowth," Paul R. Berger, Dexter A. Humphrey, Peter R. Smith, R. K. Montgomery, Niloy K. Dutta, D. Sivco, and A. Y. Cho, 4th International Conference on Indium Phosphide and Related Materials in Newport, RI (1992).

7. "In_0.2Ga_0.8As/GaAs Strained Quantum Well Lasers," Paul R. Berger, Niloy K. Dutta, John Lopata, and Naresh Chand, Conference on Lasers and Electro-optics in Baltimore, MD (1991).

8. "Monolithically Peltier-cooled Vertical Cavity Surface Emitting Lasers," Paul R. Berger, Niloy K. Dutta, Kent D. Choquette, Ghulam Hasnain, and Naresh Chand, 179th Electrochemical Society Meeting on State-of-the-Art Program on Compound Semiconductors in Washington, DC (1991).

9. "Excellent Uniformity, High Temperature Operation, Very Low Threshold Current Density (< 50 A cm^-2) 0.98 - 1.0 micron InGaAs Strained QW Lasers and their Integration with GaAs Lasers," Naresh Chand, J. P. van der Ziel, P. R. Berger, E. E. Becker, and N. K. Dutta, 179th Electrochemical Society Meeting on State-of-the-Art Program on Compound Semiconductors in Washington, DC (1991).

10. "Monolithically Integrated In_0.53Ga_0.47As/In_0.52Al_0.48As Front-End Photoreceivers Realized by Molecular Beam Epitaxy and Regrowth Techniques," R. Lai, P. R. Berger, P. Bhattacharya, Y. Zebda, W-Q. Li, and D. Pavlidis, Summer Topical Meeting on Integrated Optoelectronics in Monterey, CA (1990).

11. "Nonlinear All-Optical Modulation in a GaAs/AlGaAs Multiple Quantum Well Vertical Directional Coupler," Yi Chen, Paul R. Berger, Pallab K. Bhattacharya, Jagadeesh Pamulapati, and G. C. Vezzoli, Conference on Lasers and Electro-optics in Anaheim, CA (1988).

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